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  • Archive: 2022
29 Oct 2022
  • 2022
  • V. 21
  • 1
  • (p.25 - 33)

A study of wide band Zn1-xMgxO and (GaxIn1-x)2O3 thin films prepared by the spin coating method

DOI: https://doi.org/10.53081/mjps.2022.21-1.02

Authors:

Vadim Morari; Veaceslav Ursaki; Lidia Ghimpu; Emil Rusu; Ion Tiginyanu

Summary:

This study presents a brief analysis of Zn1-xMgxO and (GaxIn1-x)2O3 thin films deposited on Si substrates by the spin coating method. The morphology and chemical composition of the prepared thin films were studied by scanning electron microscopy (SEM) and energy dispersive X-ray (EDX) analysis. The evolution of the crystal structure with a change in the film composition and the technological conditions for annealing after spin coating was studied by X-ray diffraction (XRD) analysis. The annealing atmosphere and temperature were optimized in terms of producing films with a stoichiometric composition and a high crystalline quality.

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Keywords

  • thin films
  • SEM
  • EDX
  • XRD
  • spin coating
  • stoichiometry
  • crystal structure
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GHITU INSTITUTE OF ELECTRONIC
ENGINEERING AND NANOTECHNOLOGIES
INSTITUTE OF APPLIED PHYSICS
STATE UNIVERSITY OF MOLDOVA
PHYSICAL SOCIETY OF MOLDOVA

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